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systémy mikro-elektricko-mechanické
Record number d055617 Date 06.06.2025 Type M - MESH Topical term systémy mikro-elektricko-mechanické UDC E07.305.343J01.637.509 Note A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. subject heading
Number of the records: 1