Počet záznamov: 1
mikrotechnológia
SYS d055616 LBL 00000nx--j2200000---45-- 005 20240119200617.1 100 $a 20080101asloy0103----ba0 152 $b mesh 250 $a mikrotechnológia $x IS $x MT $x SN $x ST $8 slo 300 1-
$a 2009 $8 eng 330 1-
$a Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms. $8 eng 686 $a H01.570 686 $a J01.897.520.500 750 $a Microtechnology $8 eng 801 -0
$a SK $b BA006 $c 20081218 980 $x M
Počet záznamov: 1