A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Links
(1) - ARTICLES
subject heading
openseadragon
Number of the records: 1
This site uses cookies to make them easier to browse. Learn more about
how we use cookies.
